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TCM Microscope

TCM µScope:

Spectrometric Measurement with versatile Microscope Measurement Head, Color Measurement – Layer Thickness Measurement

In many applications where spectrometric measurement is needed, the samples are microstructured in the sample plane. For example the measurement within single pixels of Flat Panel Displays (TFT-LCD, Plasma Display, OLED Display) or the measurement on microstructured wafers in the semiconductor industry require very small spot sizes of the measurement spot. In other applications coatings on substrates have to be measured, where the coatings are very inhomogeneous even in lateral distances of a few microns. In such cases it is necessary to measure with microscope measuring heads in Reflectance and/or Transmittance and to combine such microscope heads with Spectrometer systems and light sources, for allowing microscopic measurements of spectra, color, layer thicknesses and optical constants n&k. Measurements with spot sizes of 125µm, 50µm, 25µm, 12.5µm and 5µm can be made with such systems.

Versatile Microscope Measurement System

Measurements on microscopic spot sizes
- Spectral Reflectance & Transmittance
- Color-R, Color-T
- Layer Thickesses of single layers and stacks
Integrated CCD-camera
Microscope objectives
- Long distance objectives
- Chromatically corrected for wide spectral range 380nm – 1070nm
- Infinity corrected
- 2x, 5x, 10x, 20x, 50x magnifications available
- Manual or motorized Turret available
- Measurement spot sizes from 125µm – 5µm
High Modularity by fiber optic coupling
- Spectrometer systems and light source are coupled by fiber optic cables to the microscope Head(s). Fiber optic cables with various lengths and core diameters
Optional Transmittance channel
Optional manual xyz-stage
- Different movement range
Optional motorized xyz-stage
Different xy-movement ranges available, up to 600mm x 600mm
Autofocus modul
Automatic pattern matching functionality