Helios-rc
Helios-rc
Coating Measurement of Solar Cells
Total Reflectance, Color and Layer Thickness of Coated and Uncoated Silicon Solar Wafers
Measurement of the Total Spectral Reflectance
wafer. Both, the average Reflectance level and the variation of the Reflectance over the wafer, are important and need to be controlled.
Functions of Helios-rc
Helios-rc systems are designed for precise monitoring and control of texturing and etching processes on solar wafers. These systems measure the total reflectance of the textured front side and the spatial angle reflectance of the back side of the wafer to ensure optimal surface treatment. Additionally, they can measure the thickness of thin layers on either the front or back of the wafer. Available in inline or offline (manual or scan) versions, they provide fast and reliable results for production and laboratory use.
- Single-point measurement √
- Integral total spectral reflectance measurement √
- Wavelength and reflectance value at lowest reflectance √
- Reflectance at user-definable wavelength √
- Coating layer thickness √
- User-definable quality limits √
- Good / Bad indication √
- Integrated fixed reference √
- Average Reflectance within a selectable wavelength interval √
- Color evaluation √
- Manual single axis table √
- Manual full wafer mapping √
Highlights of Helios-rc
- Offline
- Contactless and non-destructive
- Static point by point measurement
- Total Reflectance: r (integral)
- Color: c (Lab, xyY, …)
- Layer Thickness: t (for coated wafer)
- mc-wafers (polished, rough or textured)
- pc-wafers (polished, rough or textured)
- 125x125mm / 156x156mm / round / others
- Isotropic chemically etched
- Anisotropic chemically etched
- RIE (Reactive Ion Etched)
- Integrated reference standard
- Manual single-axis table for full wafer mapping
- Easy line scan
Helios
Inline measurement of SiN coating thickness and refractive index on solar wafers direct after the coating process
Sicam
Inline
Inline gap distance control of Silicon melt and heat shields in crystal pullers